Topography characterization of a deep grating using near-field imaging.

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🔗 View Article (PMID 16422329)

Published in Appl Opt on January 01, 2006

Authors

Niels Gregersen1, Bjarne Tromborg, Valentyn S Volkov, Sergey I Bozhevolnyi, Johan Holm

Author Affiliations

1: Research Center COM, NanoDTU, Technical University of Denmark, Building 345V, DK-2800 Kgs. Lyngby, Denmark. ngr@com.dtu.dk

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