Dynamic analysis of capacitive micromachined ultrasonic transducers.

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A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays. IEEE Trans Ultrason Ferroelectr Freq Control (2013) 0.81

Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes. IEEE Trans Ultrason Ferroelectr Freq Control (2003) 0.81

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