300 mm reference wafer fabrication by using direct laser lithography.

PubWeight™: 0.75‹?›

🔗 View Article (PMID 19044698)

Published in Rev Sci Instrum on October 01, 2008

Authors

Hyug-Gyo Rhee1, Dongik Kim, Seung-Ki Hong, Yun-Woo Lee

Author Affiliations

1: Space Optics Research Center, Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea. hrhee@kriss.re.kr

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